Used to form the "pyramid" suede on monocrystal wafers through chemical etching, and clean and dry the suede.

1. Compatible with M6, M10 and G12 silicon wafer;
2. Large flow circulation and multiple bubbling of process tank are adjustable;
3. Small volume internal and external tanks and inline heating are adopted to ensure temperature and medicine liquid uniformity;
4. Pyramid suede is uniform after texturing, the corrosion depth reflectance is adjustable;
5. Fast/inline liquid change;
6. PPE≥9600 pcs/h with 400 pcs/tank; ≥12000 pcs/h with 600 pcs/tank