Auto Loader/Unloader for Online Batch Etching
Description:
It is used to automatically put wafers from wafer box to texturing & cleaning machine.
Benefits:
1. Speed: 10000&16000 pcs/hr;
2. Ultra-low damage: ≤0.01%;
3. Uptime: up to 98.5%; anti-corrosion design to ensure a long lifetime and high reliability under harsh conditions;
4. Compact design, small footprint
High capacity
low damage rate
small footprint