Auto Loader/Unloader for Alkali Polishing

It is used to automatically put wafers on etching and cleaning machine from wafer containers. It can be customized on demand, and achieve seamless connection with the master machine of the client.

Key Features

Speed: 5500&11000 pcs/hr; machine customized on demand

Ultra-low damage rate: ≤0.2%

Multiple connection mode: can be provided with etching machine separately, or with other process machines